Ultra-pure PTFE Teflon Sensor - PR33S
A small footprint, ultra-pure PTFE Teflon sensor for the cleanroom environments and integrated process tools. Monitors real-time the chemical concentrations and provides an Ethernet output signal and immediate feedback to the control system. Connected to the process by a 1/4 inch, 1/2 inch, 3/4 inch or 1 inch pillar or flare fitting.
• Real-time the chemical concentrations and provides an Ethernet output
signal and immediate feedback, if the chemical is not within the specifications
• Fully digital instrument: No calibration drift and no adjustment or recalibration over time.
K-Patents Semicon Process Refractometer PR-33-S monitors real-time the consistency of liquid chemical concentrations in the ultra-clean semiconductor fabrication processes and integrated process tools. Typical uses of K-Patents PR-33-S include:
• Preventing wrong chemicals or wrong concentrations from entering the process tool or
the wet bench and thus helping to prevent expensive equipment damage and wafer scrap.
• Assisting in optimizing etch process and in increasing the bath life of the etch solution.
• Increasing wafer throughput typically by up to 20%, and reducing cleaning chemical
(e.g. EKC-265) consumption in the post etch polymer removal.
• Helping to achieve tight control of CMP slurries and better uniformity of the planarization process
| Technical Details | |
| Refractive Index Range (Standard) | Full range, nD=1.3200...1.5300 (corresponds to 0...100% b.w.), Spinel prism |
| Refractive Index Range (Option) |
nD=1.2600...1.4700, Sapphire prism (for Hydrofluoric acid HF) |
| Output Units | nD / R.I. (Refractive Index) / Conc% / g/l |
| Accuracy | R.I. ± 0.0002 (corresponds typically to ± 0.1% b.w.). Repeatability and stability correspond to accuracy |
| Speed of Response | 1s undamped, damping time selectable up to 5 min |
| Patented CORE-optics | No mechanical adjustments and digital measurement with 3648 pixel CCD element, 589 nm wavelength (sodium D-line) light emitting diode (LED), built-in Pt-1000 temperature sensor (linearization according to IEC 751) |
| Temperature Compensation | Automatic, digital compensation |
| Instrument Verification | NIST traceable calibration, verification with standard R.I. liquids and K-Patents documented procedure (ISO 9000) |
| Sensor PR-33-S | |
| Sensor Wetted Parts | Ultra-pure PTFE Teflon®, prism gasket Teflon®, prism Spinel (standard), O-ring Kalrez, adaptor Sapphire |
| Sensor Housing | PTFE Teflon® |
| Process Connection | Flare fittings or Pillar fittings; fitting sizes 1/4 inch, 1/2 inch, 3/4 inch or 1 inch |
| Process Temperature | -20°C (-4°F)...85°C (185°F) |
| Ambient Temperature | -20°C (-4°F)...45°C (113°F) |
| Sensor Protection Class | IP67, Nema 4X |
| Sensor Weight | 1.2 kg (2.6 lbs) |
| Outputs and Connections | IEEE 802.3af PoE (Power over Ethernet) for power supply and data transfer, directly connectable to an Ethernet LAN (Local Area Network) |
| Power Consumption | Max. 1W |
| Ethernet Connection | 10/100Base-T Ethernet |
| Remote Functions |
Remote access with a web browser, data acquisition |
| Patents | US Patents US6067151 and US6760098B2, German Patent DE19855218 |
| Sensor Cable | FEP-covered Ethernet cable between sensor and PoE switch; cable type Cat 5e Ethernet with RJ-45 connector, cable length 10 m (33 ft) |
| Options | IEEE 802.3af compliant PoE switch (4 + 4 ports, 48 Vdc input); Power supply unit for the PoE adapter (84-264 Vac); Ethernet to mA output unit (2 x 4-20 mA) |
| Note: Specification are subject to change without notice. | |
| Download Catalog | |
| PR33S |  |
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For all inquiries, you may contact us through Telephone, Email or Live Chat Support.
Operating Hours
Monday to Friday: 8.00am to 5.30pm
Technical Support (After Office Hour)
Tel: (65) 9876 6258
Contact Informations
| By Phone / Fax | By Email | By Live Chat | |
| Tel: (65) 6553 0366 Fax: (65) 6553 0828 |
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